High Temperature Microwave Plasma Processing System
Microwave plasma processing system at atmospheric pressure is based on surfaguide design applicator. The Surfaguide is
designed to be used equally in R&D laboratories and industry for a very large range of applications. Typical applications of
such source are atmospheric high temperature chemistry, nano-powder synthesis, surface activation, gas abatement,
gasification, sterilization tube. Moreover, in order to extend the operating conditions in the atmospheric pressure range and in
the high power range, the dielectric tube has an air cooling possibility and the Surfaguide, water cooling
The system consists of the following sub-systems
Sliding short WR 340,
Water cooled applicator ,
Three stub tuners
Launcher section WR 340 and the isolator with dummy load & power supply
An applicator, a screw feeder assembly is
Bottom side of an applicator a sample collection chamber
Bottom side of an applicator is covered with faraday cage
Non- contact pyrometer shall be used to measure the temperature of the flame & surrounding from Lumasense Technology or reputed manufactures.
9. Two Line Gas Manifold:
Two line gas manifold to accommodate MFC from Bronkhost make
Ar gas flow 0-10 LPM, 1% full scale accuracy, digital display with controlling tab
He gas flow 0-10 LPM, 1% full scale accuracy, digital display with controlling tab
10Micro Screw Feeder details as given above sketch