- Home Page
- Company Profile
- Our Products
- Contact Us
Backed by our 13 years of industry experience, we are offering excellent quality Load Lock System PECVD to our esteemed clients. The offered system is manufactured by our adept professionals by making use of supreme grade components and latest techniques at our technically sound production unit as per the global industry standards. This system is highly efficient and mainly used in research field & laboratories for various applications. Our Load Lock System PECVD is rigorously tested on different measure to meet the set parameters of quality.
High operational fluency
PECVD with Load Lock System:
Reactor: Stainless Steel 304L SS or 316 SS.
Electrodes: Anode and Cathode have perfect design. Maximum power can be applied without much reflected power loss, perfect gas shower design made. RF biased substrate Holder
Substrate :Heating arrangement maximum up to 800Ã‚°C
Gas Manifold: Made from SS tubes 316, Pneumatic ON/OFF valves, Particle filters & Mass flow controllers.
Pumping Line: High vacuum line, Pneumatic ON/OFF valves. Auto throttle valve with pressure controlled system ,
Vacuum System: Vacuum better than 10-7 Torr. based on Turbo/Diffusion pump, Roots Rotary Vacuum pump, Penning Pirani vacuum gauges
RF Power supply: Matching network, L.F. filter with self -bias measurement & DC power supply.
Control Panel : Manual and or PLC controlled
Safety : Completely Safety Interlocked