Microwave ECR system

Microwave ECR system

100000 - 9500000 INR/Unit

Product Details:

  • Application Industrial
  • Power 50 Watt (w)
  • Material Ms
  • Color Grey
  • Voltage 240 Volt (v)
  • Display Type Digital
  • Supply Ability : 4 Per Month
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Price And Quantity

  • 100000 - 9500000 INR/Unit
  • 1 Unit

Product Specifications

  • Industrial
  • 50 Watt (w)
  • Digital
  • Ms
  • Grey
  • 240 Volt (v)

Trade Information

  • 4 Unit Per Month
  • 1-16 Week
  • All India

Product Description

Microwave (2.45 GHz) ECR system

 

  • PLC controlled microwave ECR system
  • UHV SS vacuum chamber complete with vacuum pumping station including turbo pump based pumping
  • Four line gas manifold with MFC
  • 1.5 Kilowatt microwave power generator with forward and reflected power measurement, three stub tuner and special applicator with mode transfer facility
  • The system is suitable for high rate etching oxides like silicon oxide and synthetic diamond deposition including Nano-diamond aligned carbon nanotubes & graphene

 

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