Microwave ECR System

About Microwave ECR System

Our proficiency in this domain enables us to manufacture, export and supply a broad assortment of Microwave ECR System. Offered system is carefully manufactured with the implementation of the contemporary technology and by utilizing premium quality components in adherence to prevailing industry guidelines of quality. Under the guidance of adroit professionals, this fully automated system find its application in laboratories and nuclear reactors. In addition, this Microwave ECR System is made to pass through rigorous examining process to ensure its performance at clients end. Features: No maintenance Easy to operate Hassle-free working Less power consumption Microwave (2.45 GHz) ECR system PLC controlled microwave ECR system UHV SS vacuum chamber complete with vacuum pumping station including turbo pump based pumping Four line gas manifold with MFC 1.5 Kilowatt microwave power generator with forward and reflected power measurement, three stub tuner and special applicator with mode transfer facility The system is suitable for high rate etching oxides like silicon oxide and synthetic diamond deposition including Nano-diamond aligned carbon nanotubes & graphene