RF Magnetron Sputtering System

RF Magnetron Sputtering System

100000 - 9500000 INR/Unit

Product Details:

  • Power 60 Watt (w)
  • Application Industrial
  • Voltage 260 Volt (v)
  • Material Ms
  • Color Grey
  • Display Type Digital
  • Click to View more

Price And Quantity

  • 100000 - 9500000 INR/Unit
  • 1 Unit

Product Specifications

  • Digital
  • Ms
  • Grey
  • 260 Volt (v)
  • Industrial
  • 60 Watt (w)

Trade Information

  • 4 Unit Per Month
  • 1-16 Week
  • All India

Product Description

RF/DC Magnetron Sputtering System:

  • Reactor: Stainless Steel 304L SS or 316 SS.

  • Magnetron Sputtering Cathode: Cathode has perfect design. Maximum power can be applied without much reflected power loss with perfect gas shower design.

  • Substrate: Heating arrangement maximum up to 800°C with substrate rotation facility & RF/DC bias application provision.

  • Gas Manifold: Made from SS tubes 316, Pneumatic ON/OFF valves, Particle filters & Mass flow controllers.

  • Pumping Line: High vacuum line, Pneumatic ON/OFF valves. Auto throttle valve with pressure controlled system ,

  • Vacuum System: Vacuum better than 10-7 Torr. based on Turbo/Diffusion pump back by Rotary Vacuum pump, Penning Pirani vacuum gauges

  • RF Power supply: Matching network, L.F. filter with self -bias measurement & DC power supply.

  • Control Panel : Manual and or PLC controlled

  • Safety : Completely Safety Interlocked

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